Product

Piezoelectric Film

High Quality Piezoelectric Film Coating Service

PZT and Lead-free thin-film coating service with (001) preferred crystal orientation control and high uniformity.

Solution Specs

Item	Value
Composition	Customers' preference (including dopants)
Target thickness	150 nm ~ 2 µm
Substrate size	Sample size ~ 8 inch
Standard substrate	Pt/Ti/SiO₂/Si, Pt/Ti on SOI wafer or other MEMS structured wafers
Data	Basic data and process flow chart provided

Inquiry